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高档半自动撕金机SDT-100P

半导体设备

市场价:￥0.00

价格:￥0.00

<table cellpadding="0" cellspacing="0" width="1033" height="589" style="width: 375px;"><tbody><tr height="36" style="height:36px" class="firstRow"><td style="" width="188">型号</td><td style="" width="845">SDT-100P</td></tr><tr height="45" style="height:45px"><td style="" width="188">Wafer尺寸/外形尺寸</td><td style="" width="845"> 6英寸  /  1100(L) x 550(W) x 600(H) mm</td></tr><tr height="30" style="height:29px"><td style="" width="188">Wafer厚度</td><td style="" width="845">300um~750um</td></tr><tr height="34" style="height:33px"><td style="" width="188">膜料类型</td><td style="" width="845">专用撕金膜，宽度180mm</td></tr><tr height="33" style="height:33px"><td style="" width="188">工作效率</td><td style="" width="845">40-60片/小时</td></tr><tr height="34" style="height:33px"><td style="" width="188">晶圆放置台温度</td><td style="" width="845">室温-70℃可调</td></tr><tr height="32" style="height:32px"><td style="" width="188">控制系统</td><td style="" width="845">松下PLC控制单元</td></tr><tr height="37" style="height:37px"><td style="" width="188">人机交互界面</td><td style="" width="845">松下触摸屏及按钮</td></tr><tr height="34" style="height:35px"><td style="" width="188">静电去除装置</td><td style="" width="845">离子风扇</td></tr><tr height="39" style="height:39px"><td style="" width="188">Wafer定位</td><td style="" width="845">载台轮廓线定位</td></tr><tr height="36" style="height:36px"><td style="" width="188">Wafer放置台</td><td style="" width="845">特氟龙处理真空平台（多孔平台）</td></tr><tr height="30" style="height:31px"><td style="" width="188">Wafer真空度</td><td style="" width="845">负压表</td></tr><tr height="32" style="height:32px"><td style="" width="188">滚轮压力</td><td style="" width="845">压力可调</td></tr><tr height="44" style="height:44px"><td style="" width="188">撕膜原理</td><td style="" width="845">橡皮轮自动滚压 撕膜胶带，粘离涂层</td></tr><tr height="35" style="height:35px"><td style="" width="188">废膜处理</td><td style="" width="845">自动缠绕</td></tr><tr height="49" style="height:49px"><td style="" width="188">供电、供气</td><td style="" width="845">220 V；50/60 Hz；10A； 0.6MPa 干燥压缩空气</td></tr></tbody></table>
FDUM-1000 全自动倒膜机

半导体设备

市场价:￥0.00

价格:￥0.00

<table cellspacing="0" cellpadding="0" width="584" style="width: 360px;"><tbody><tr style=";height:28px" class="firstRow"><td width="262" style="border: 1px solid windowtext; padding: 0px 7px;" height="28">Wafer尺寸</td><td width="321" style="border-top: 1px solid windowtext; border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-image: initial; border-left: none; padding: 0px 7px;" height="28">8英寸</td></tr><tr style=";height:5px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="5">Wafer厚度</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="5">200um~1000um</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Wafer在铁环盒初始状态</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">晶圆朝上，膜在下</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28"><a name="_Hlk102919414"></a>Frame 规格</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">8英寸</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">膜</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">UV膜，膜宽度300-350mm</td></tr><tr style=";height:28px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">工作效率</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">35-50片/小时</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">晶圆放置台特征</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">不锈钢（表面特氟龙）环形槽吸附</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">晶圆放置台功能</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">可升降台面</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">Frame放置台</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">可倾斜 （配置氮气吹入）</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">控制系统</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">PLC</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">人机交互界面</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">触摸屏</td></tr><tr style=";height:23px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">静电去除装置</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">离子棒/离子风扇</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">上下料</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">全自动（自动上下料，翻转进入最终料盒）</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Wafer相对于Frame中心位置偏差</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">±1mm</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">位置偏差检测</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">带偏差检测功能</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">设备切膜后，膜外露晶圆量</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">±3mm </td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Frame定位</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">外形定位 精度±0.5mm</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">贴膜原理</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">橡皮轮自动滚压</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">切割</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">自动环切</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">新膜用尽量检测</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">接近用完前有提醒</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">废膜处理</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">自动缠绕</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">UV单元</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">可有效照射230*230mm区域内的产品，有氮气保护功能（也可以覆盖铁环照射300*300mm）</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">FFU</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">贴膜区域上方配置一套</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">作业安全</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">设备自身故障自动停机报警</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供电</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">220 V；50/60 Hz；15A</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供气</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">0.5MPa   干燥压缩空气</td></tr><tr><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">外形尺寸</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">1300 (D)×1900mm (W) ×2250mm (H)</td></tr><tr><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">净重</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">~400kg</td></tr></tbody></table>
SVM-100 真空贴膜机

半导体设备

市场价:￥0.00

价格:￥0.00

<table cellspacing="0" cellpadding="0" width="584" style="width: 360px;"><tbody><tr style=";height:28px" class="firstRow"><td width="262" style="border: 1px solid windowtext; padding: 0px 7px;" height="28">Wafer尺寸</td><td width="321" style="border-top: 1px solid windowtext; border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-image: initial; border-left: none; padding: 0px 7px;" height="28">6寸/8寸（客户指定其中规格）</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Wafer厚度</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">200um~750um</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Frame 规格</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">6寸/8寸（客户指定其中规格）</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">膜</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">Frame在其他贴膜设备贴好膜</td></tr><tr style=";height:28px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Wafer定位</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">CHUCK  TABLE上对应WAFER形状的刻线，真空吸固定WAFER</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">Frame定位</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">浮动定位销</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">Wafer放置台</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">防静电特氟龙处理真空平台，可升降</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">工作效率</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">20-30片/小时</td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">控制系统</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">PLC       </td></tr><tr style=";height:23px"><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">人机交互界面</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">触摸屏</td></tr><tr style=";height:23px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">贴膜原理</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">抽真空吸附贴膜</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">装卸方式</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">产品人工手动放置与取出</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">作业安全</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">设备自身故障自动停机或急停按钮</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供电</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">220 V；50/60 Hz；15A</td></tr><tr style=";height:28px"><td width="262" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供气</td><td width="321" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">0.5MPa   干燥压缩空气</td></tr><tr><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">外形尺寸</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">520 (D)×650mm (W) ×1020mm (H)       （不含外置真空泵）</td></tr><tr><td width="262" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">净重</td><td width="321" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">~150kg（不含外置真空泵）</td></tr></tbody></table>
SFE-100 铁环扩铁环扩膜机

半导体设备

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高档半自动扩膜机（伺服电机式）该晶圆扩膜机是用于常规切割或激光切割制程之后，将膜均匀拉伸，从而使切割后的晶粒分离,并均匀拉开一定距离的设备，扩膜动力采用伺服电机驱动滚珠丝杆扩膜，扩膜高度及速度可在配置的触摸屏中参数化进行设置。型号 SFE-100Wafer尺寸 8英寸及以下尺寸Frame尺寸1 10英寸(328*328mm)Frame尺寸2 8 英寸（276*276mm）胶膜(须具备较好的延展性) 蓝膜或UV膜；厚度0.05mm~0.15mm人机界面触摸屏（设定扩膜速度和扩膜高度等参数）控制系统 PLC扩膜高度行程15~55mm，参数化设定，精度±0.1mm扩膜速度 1~15mm/s范围内任意设定扩膜方式松下伺服电机驱动精密滚珠丝杆工作台加热式工作台，室温~100℃可设定工作效率 45-50片/小时Frame定位定位销铁环外膜的处理自动切割设备外壳烤漆设备形式落地式供电 220 V；50/60 Hz；5A供气 0.5MPa 干燥压缩空气外形尺寸 730mm (宽) × 800mm (深) ×1300mm（高)净重 100Kg 电器元件松下，OMRON等品牌气动元件日本小金井，SMC等品牌机械标准件 NSK，MISUMI等品牌
全自动撕金机

半导体设备

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FDT-1000 全自动撕金机技术参数指标<table cellspacing="0" cellpadding="0" width="584" style="width: 360px;"><tbody><tr style=";height:28px" class="firstRow"><td width="215" style="border: 1px solid windowtext; padding: 0px 7px;" height="28">Wafer尺寸</td><td width="369" style="border-top: 1px solid windowtext; border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-image: initial; border-left: none; padding: 0px 7px;" height="28">6，8英寸（客户指定规格）</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">产品类型</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">Si，LT,LN</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Wafer厚度</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">300um~750um</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">膜</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">专用蓝膜或UV膜</td></tr><tr style=";height:28px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">工作效率</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">45-50片/小时</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">晶圆工作台</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">表面特氟龙 环形槽吸附晶圆，吸附力可调</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">放置台温度</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">室温-80℃可调 精度±2℃</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">控制系统</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">PLC或工控机</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">晶圆搬运</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">晶圆机械手 精度±0.2mm</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">晶圆定位</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">专用寻边器 精度±0.2mm</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">晶圆盒</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">1个工位（25片/盒）</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">晶圆初始状态</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">金面向上，机械手从下方托取晶圆，无需机械手翻转</td></tr><tr style=";height:23px"><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">人机交互界面</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">触摸屏及按钮</td></tr><tr style=";height:23px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="23">静电去除装置</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="23">离子风扇</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">上下料</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">全自动</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Wafer放置台</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">防静电特氟龙处理真空平台。</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">撕晶方式</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">用撕膜胶带粘需撕的膜</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">撕膜原理</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">橡皮轮自动滚压 </td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">贴膜压力</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">0.1-0.5Mpa</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">撕晶装置</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">自动滚轮对滚进行撕晶</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">撕膜角度</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">10-30度 （粗略可调，选择最好的角度可靠撕金即可）</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">撕膜速度</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">2-20mm/s</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">废膜处理</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">自动缠绕</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">作业安全</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">设备自身故障自动停机报警</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供电</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">单相220 V；50/60   Hz；15A</td></tr><tr style=";height:28px"><td width="215" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供气</td><td width="369" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">0.5MPa 干燥压缩空气</td></tr><tr><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">外形尺寸</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">1037mm (W) ×2100mm (H)×1325mm (D)</td></tr><tr><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">净重</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">~400kg</td></tr><tr><td width="215" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">标准件</td><td width="369" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">均采用进口知名品牌</td></tr></tbody></table>
二流体清洗机

半导体设备

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设备规格：CS-100 设备简介:*  专用于清洗切割后之晶片 (Wafer) QFN,或玻璃片表面微尘* 高速离心脱水，工件表面无水痕残留* 清洗流程：二流体清洗(可分段设置)-离心干燥* 采用二流体清洗装置，能有效的提高清洗效果* 配备除静电离子风系统* 配备空气过滤系统，使用压缩空气更加洁净* 整体不锈钢镜面机身坚固耐用，耐酸性、碱性等清洗液基本参数：*  清洗盘尺寸：8寸    (采用标准化陶瓷吸盘)   铁环：标准8寸* 清洗方式：二流体清洗* 干燥方式：高速离心脱水* 电机最大转数：3000r/min  ,设备安全转数设定:100-2000 r/min (可调)* 压缩空气：0.45~0.7Mpa* 纯水接入水压：>2.0Kg* 空气过滤精度：0.01UM* 可清洗 Particle 颗料最小直径：0.5um* 设备材料:整机镜面不锈钢* 机器净重：100KG* 控制方式：PLC+触摸屏（松下品牌）* 电源：380V 50HZ (最大功率 3KW)*  机器尺寸：800mm(D)  ×500mm(W)  × 1896mm(H)  (含报警灯)
12寸扩膜机

半导体设备

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<table cellspacing="0" cellpadding="0" width="621" style="width: 358px;"><tbody><tr style=";height:28px" class="firstRow"><td width="308" style="border: 1px solid windowtext; padding: 0px 7px;" height="28">型号</td><td width="314" style="border-top: 1px solid windowtext; border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-image: initial; border-left: none; padding: 0px 7px;" height="28">SE-200</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Wafer尺寸</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">12寸（客户指定）</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Frame尺寸</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">12英寸(DISCO标准/K&S标准)或客户指定 </td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">胶膜(须具备较好的延展性)</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">蓝膜或UV膜；厚度0.05mm~0.15mm</td></tr><tr style=";height:28px"><td width="308" rowspan="2" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">扩晶环</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">内环：330-338</td></tr><tr style=";height:28px"><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">外环：338-347</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">人机界面</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">松下触摸屏</td></tr><tr style=";height:33px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="33">控制系统</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="33">PLC</td></tr><tr style=";height:29px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="29">扩膜高度</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="29">行程18~60mm，参数化，精度±0.05mm</td></tr><tr style=";height:45px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="45">扩膜方式</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="45">松下伺服电机驱动精密滚珠丝杆顶出，速度，位置参数化设定</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">扩膜速度</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">1~10mm/s 可任意设定</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">套子母环方式</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">采用日本小金井汽缸自动套母环</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">工作台</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">ORMON温控器，室温~80℃可调，误差+/-3℃</td></tr><tr style=";height:28px"><td width="308" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">工作效率</td><td width="314" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">60片/小时</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">Frame定位</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">定位销</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">切割</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">手动切割/自动切割    可选</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供电</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">220 V；50/60 Hz；5A</td></tr><tr style=";height:28px"><td width="308" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;" height="28">供气</td><td width="314" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;" height="28">0.5MPa   干燥压缩空气</td></tr><tr><td width="308" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">外形尺寸</td><td width="314" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">500mm (宽) × 680mm (深) ×550mm（高)</td></tr><tr><td width="308" valign="top" style="border-right: 1px solid windowtext; border-bottom: 1px solid windowtext; border-left: 1px solid windowtext; border-image: initial; border-top: none; padding: 0px 7px;">净重</td><td width="314" valign="top" style="border-top: none; border-left: none; border-bottom: 1px solid windowtext; border-right: 1px solid windowtext; padding: 0px 7px;">65Kg </td></tr></tbody></table>
切割液注入机

半导体设备

市场价:￥0.00

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DI系列切割液注入机专为电子半导体行业设计，是用来满足晶圆清洗药水的自动补加设备，通过注液泵将切割液按照比例输送至切割机，根据客户不同需求，最多可同时为4台切割机同时提供切割液。 <table cellpadding="0" cellspacing="0" width="408" style="width: 358px;"><colgroup><col width="125" style=";width:125px"/><col width="143" style=";width:143px"/><col width="140" style=";width:140px"/></colgroup><tbody><tr height="37" style=";height:37px" class="firstRow"><td height="37" width="125" style="">型号</td><td width="143" style="">DI-10</td><td width="140" style="">DI-20</td></tr><tr height="37" style=";height:37px"><td height="37" width="125" style="">输入电压</td><td width="143" style="">200~240V   AC ±10%</td><td width="140" style="">200~240V   AC ±10%</td></tr><tr height="37" style=";height:37px"><td height="37" width="125" style="">频率</td><td width="143" style="">50/60Hz</td><td width="140" style="">50/60Hz</td></tr><tr height="37" style=";height:37px"><td height="37" width="125" style="">注液泵速率</td><td width="143" style="">2   L/hour最大</td><td width="140" style="">2   L/hour最大</td></tr><tr height="37" style=";height:37px"><td height="37" width="125" style="">液位限制</td><td width="143" style="">磁浮开关</td><td width="140" style="">磁浮开关</td></tr><tr height="37" style=";height:37px"><td height="37" width="125" style="">水压（去离子水）</td><td width="143" style="">5kg/cm²   最大</td><td width="140" style="">5kg/cm²   最大</td></tr><tr height="37" style=";height:37px"><td height="37" width="125" style="">储液室容量</td><td width="143" style="">1.5   加仑</td><td width="140" style="">20   加仑</td></tr><tr height="37" style=";height:37px"><td height="37" width="125" style="">尺寸(W*D*H)</td><td width="143" style="">250*400*300   (mm)</td><td width="140" style="">460*610*950   (mm)</td></tr></tbody></table>

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